| Title | Specifications |
|---|---|
| Size | 1000mm1000mm |
| SKU | S22100T1000S22100T1000 |
| Fly Height Example | 0.0032 in80 microns |
| Input Pressure | 21.0 psi145 kPa |
| Input Pressure Flow | 51.6 SCFH22.31 NLPM |
| Input Vacuum | 2.0 in H2050.8 mm H20 |
| Input Vacuum Flow | 34.8 SCFH15.05 NLPM |
| Substrate Fly Height Range | 0.0008 - 0.0047 in20 - 120 microns |
| Fly Height Control | 197 μ in±5 microns |
| Air Film Stiffness | 0.21 lbs/μ in0.04 N/micron |
| Stability | 0.2 μ in±5 nanometers |
| Transition Zone Air Bar Length | 39.60 in1006 mm |
| Transition Zone Air Bar Width | 3.94 in100 mm |
| Transition Zone Air Bar Height | 1.69 in42.85 mm |
| Transition Zone Air Bar Weight | 9.5 lbs4.31 kg |
| Housing Material/Finish | Aluminum/AnodizedAluminum/Anodized |
| Porous Media Material | CarbonCarbon |
| Bearing Face Surface Size - Carbon | 3.94 x 39.37 in100 x 1000 mm |
| Bearing Face Surface Flatness | 0.001 in0.025 mm |
| Air Supply | Bottom-Mounted ManifoldBottom-Mounted Manifold |
| Vacuum Supply | Bottom MountedBottom Mounted |
| Viable Pressure Range | 0.5 - 40.0 psi3.48 - 275.79 kPa |
| Maximum Allowable Pressure Supply | 40.0 psi275.79 kPa |
| Substrate Size | up through Gen 10 and beyondup through Gen 10 and beyond |
| Substrate Thickness | 0.0118 in and up0.3 mm and up |
| Maximum Substrate Speed | 8.2 ft/sec2.5 m/sec |
Attachments:




